A Portable Valveless Piezoelectric Micropump ---Design, Production and Application
碩士 === 國立臺灣大學 === 應用力學研究所 === 91 === A portable valveless micropump has been successfully made in this thesis by the method of replica modeling. To produce the pump, the 76×52×1mm glass plate is used as the substrate.The SU8-2050 negative photo resist is coated with the thickness of 62um on the subs...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89097982263299605961 |