Development of an Novel Intelligent Pneumatic-Piezoelectric Hybrid Servo Positioning X-Y Platform with Large Stroke and Submicrometer Precision
碩士 === 國立臺灣科技大學 === 自動化及控制研究所 === 91 === Because of the high compressibility of air,high friction and high non-linearity, the positioning accuracy of the conventional servo pneumatic system is restricted within about 1 µm. The objective of this thesis is to develop a novel intelligent pn...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/55133094001042321742 |