Two-Step Growth of MOCVD Copper Using the mixture of ethanol alcohol and water as the additive

碩士 === 國立臺灣科技大學 === 化學工程系 === 91 === The purpose of this thesis is to investigate the two-step growth of MOCVD copper using thin films the mixture of ethanol alcohol and water as the additive. In the first step , we deposited Cu2O films with the mixture of ethanol alcohol and water as the additive a...

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Bibliographic Details
Main Authors: Chia-Wie Chen, 陳家偉
Other Authors: Chia pyng Lee
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/85463140612554993861