Two-Step Growth of MOCVD Copper Using the mixture of ethanol alcohol and water as the additive
碩士 === 國立臺灣科技大學 === 化學工程系 === 91 === The purpose of this thesis is to investigate the two-step growth of MOCVD copper using thin films the mixture of ethanol alcohol and water as the additive. In the first step , we deposited Cu2O films with the mixture of ethanol alcohol and water as the additive a...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2003
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Online Access: | http://ndltd.ncl.edu.tw/handle/85463140612554993861 |