Research and Development of Dynamic Mask Technology and Its Application on 3D Micro-Device Fabrication
碩士 === 國立臺灣科技大學 === 機械工程系 === 91 === The aim of this research is to develop the dynamic mask technology and to apply this technology to micro-device fabrication or 3D Part fabrication. As the result, a prototype system has been developed. In MEMS process, if wanted to fabricate 3D part or device, it...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/70644615618145183256 |