The study of wafer heating parameters in a LPCVD process
碩士 === 中國文化大學 === 材料科學與製造研究所 === 91 === In the semiconductor industry, it is an important manufacturing process to deposit a thin film of material on wafer surfaces. Rapid Thermal Processing (RTP) is one of the typical chemical vapor deposition processes. In the process, one wafer is placed in the f...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38524791669349693215 |