High Gate Leakage Current Characterization and Analysis of Ultra-thin Gate Oxide Nano MOS Device.

碩士 === 國立臺北科技大學 === 自動化科技研究所 === 91 === Owing to the device’s shrinking down to nano scale, semiconductor MOS device is now getting into the deep sub-micron regime. As the roadmaps’ expectancy of many related powerful authorities in this semiconductor technology field, the channel length...

Full description

Bibliographic Details
Main Authors: Wen-Liang Hsu, 許紋梁
Other Authors: Heng-Sheng Huang
Format: Others
Language:en_US
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/81277873797449488530