MEMS Testing Using Laser Interferometer
碩士 === 國立臺北科技大學 === 光電技術研究所 === 91 === This thesis is to study the capability of determining MEMS (Microelectromechanicalmechanical system) displacements and profile using interferometers. Where the displacements includes the static and dynamic displacements of a point of the MEMS, and the profile...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32835467380517499834 |