MEMS Fabricated Mold for Wafer-Level Injection Micromolding
碩士 === 國立臺北科技大學 === 製造科技研究所 === 91 === This thesis combines MEMS，UV-LIGA process and injection micromolding fabricate the micro fluidic and micro channel, and transfer these micro pattern from molding to the polymer material. To advance the field of MEMS applications to mass fabricated of...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86582700663389953297 |