Study and Implementation of CMOS Compatible Micromachined Tunable
碩士 === 國立臺北科技大學 === 機電整合研究所 === 91 === This thesis presents a highly tunable micro capacitor by using CMOS processes and extra post-process techniques of MEMS. We use via, metal, poly, Contact, N+ implantation to achieve the objective of CMOS-MEMS tunable capacitor. Then usage of the post-process of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59575490707726636844 |