Analysis and Design of MEMS RF Probe Cards
碩士 === 國立臺北科技大學 === 機電整合研究所 === 91 === This paper presents a novel RF probe module design which can be fabricated by MicroElectroMechanical (MEM) fabrication process to reduce the cost. This design uses rectangular coaxial transition to air coplanar-waveguide (CPW) transmission line. Then, use one g...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/82837621861989908429 |