A Study for the Particle Characteristics and the Validation of Breather Port Performance of 300mm Wafer FOUP/LPU Systems
碩士 === 國立臺北科技大學 === 冷凍與低溫科技研究所 === 91 === A minienvironment system combined with FOUP (Front Opening Unified Pod) and LPU(Load Port Unit) is the main wafer transmission equipment in 300mm wafer manufacturing processes. FOUP is used to held and transport of wafers, while LPU is used to ope...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/58639444769837590559 |