A Study for the Particle Characteristics and the Validation of Breather Port Performance of 300mm Wafer FOUP/LPU Systems
碩士 === 國立臺北科技大學 === 冷凍與低溫科技研究所 === 91 === A minienvironment system combined with FOUP (Front Opening Unified Pod) and LPU(Load Port Unit) is the main wafer transmission equipment in 300mm wafer manufacturing processes. FOUP is used to held and transport of wafers, while LPU is used to ope...
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ndltd-TW-091TIT007030092015-10-13T13:35:32Z http://ndltd.ncl.edu.tw/handle/58639444769837590559 A Study for the Particle Characteristics and the Validation of Breather Port Performance of 300mm Wafer FOUP/LPU Systems 300mm晶圓載卸模組FOUP/LPU之汙染粒子特性及裝設呼吸孔有效性確認之研究 CHUN-MING CHEN 陳俊銘 碩士 國立臺北科技大學 冷凍與低溫科技研究所 91 A minienvironment system combined with FOUP (Front Opening Unified Pod) and LPU(Load Port Unit) is the main wafer transmission equipment in 300mm wafer manufacturing processes. FOUP is used to held and transport of wafers, while LPU is used to open the side door of FOUP and makes the wafer stored in FOUP can be loaded into the production machine through a robot arm. During the operating procedures, some problems need to be placed importance on. For example, whether the particles produced by colliding with FOUP and the joint surface of minienvironment will enter the system? Whether the negative pressure produced by instant action of opening side door of FOUP will make the particles outside of system contaminate the wafers? If FOUP equipped with a breather port, can FOUP exclude the particles outside of system? These all are the key technical bottlenecks. Using a manometer, an oxygen detector and several particle counters, this thesis establishes a complete testing process to practically estimate the particle problems under various conditions. In addition, using oxygen detector and air compressor, the leakage characteristics of the FOUPs were quantitatively determined. SHIH-CHENG HU 胡石政 2003 學位論文 ; thesis 88 zh-TW |
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碩士 === 國立臺北科技大學 === 冷凍與低溫科技研究所 === 91 === A minienvironment system combined with FOUP (Front Opening Unified Pod) and LPU(Load Port Unit) is the main wafer transmission equipment in 300mm wafer manufacturing processes. FOUP is used to held and transport of wafers, while LPU is used to open the side door of FOUP and makes the wafer stored in FOUP can be loaded into the production machine through a robot arm. During the operating procedures, some problems need to be placed importance on. For example, whether the particles produced by colliding with FOUP and the joint surface of minienvironment will enter the system? Whether the negative pressure produced by instant action of opening side door of FOUP will make the particles outside of system contaminate the wafers? If FOUP equipped with a breather port, can FOUP exclude the particles outside of system? These all are the key technical bottlenecks.
Using a manometer, an oxygen detector and several particle counters, this thesis establishes a complete testing process to practically estimate the particle problems under various conditions. In addition, using oxygen detector and air compressor, the leakage characteristics of the FOUPs were quantitatively determined.
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author2 |
SHIH-CHENG HU |
author_facet |
SHIH-CHENG HU CHUN-MING CHEN 陳俊銘 |
author |
CHUN-MING CHEN 陳俊銘 |
spellingShingle |
CHUN-MING CHEN 陳俊銘 A Study for the Particle Characteristics and the Validation of Breather Port Performance of 300mm Wafer FOUP/LPU Systems |
author_sort |
CHUN-MING CHEN |
title |
A Study for the Particle Characteristics and the Validation of Breather Port Performance of 300mm Wafer FOUP/LPU Systems |
title_short |
A Study for the Particle Characteristics and the Validation of Breather Port Performance of 300mm Wafer FOUP/LPU Systems |
title_full |
A Study for the Particle Characteristics and the Validation of Breather Port Performance of 300mm Wafer FOUP/LPU Systems |
title_fullStr |
A Study for the Particle Characteristics and the Validation of Breather Port Performance of 300mm Wafer FOUP/LPU Systems |
title_full_unstemmed |
A Study for the Particle Characteristics and the Validation of Breather Port Performance of 300mm Wafer FOUP/LPU Systems |
title_sort |
study for the particle characteristics and the validation of breather port performance of 300mm wafer foup/lpu systems |
publishDate |
2003 |
url |
http://ndltd.ncl.edu.tw/handle/58639444769837590559 |
work_keys_str_mv |
AT chunmingchen astudyfortheparticlecharacteristicsandthevalidationofbreatherportperformanceof300mmwaferfouplpusystems AT chénjùnmíng astudyfortheparticlecharacteristicsandthevalidationofbreatherportperformanceof300mmwaferfouplpusystems AT chunmingchen 300mmjīngyuánzàixièmózǔfouplpuzhīwūrǎnlìzitèxìngjízhuāngshèhūxīkǒngyǒuxiàoxìngquèrènzhīyánjiū AT chénjùnmíng 300mmjīngyuánzàixièmózǔfouplpuzhīwūrǎnlìzitèxìngjízhuāngshèhūxīkǒngyǒuxiàoxìngquèrènzhīyánjiū AT chunmingchen studyfortheparticlecharacteristicsandthevalidationofbreatherportperformanceof300mmwaferfouplpusystems AT chénjùnmíng studyfortheparticlecharacteristicsandthevalidationofbreatherportperformanceof300mmwaferfouplpusystems |
_version_ |
1717738374550257664 |