The Research of Miniaturized Device Profile Measurement by Using Image Processing Technique
碩士 === 淡江大學 === 航空太空工程學系 === 91 === This study is using shape from focus method for micro-component’s dimensional measurement. We established a computer controlled CMM system with optical device as an object’s detect sensor. The microscope of fixed focus is mount on the Z-axis stage that...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19936957895138676334 |