The Research of Miniaturized Device Profile Measurement by Using Image Processing Technique

• Main Authors: Chien-Ming Huang, 黃建銘
• Other Authors: Pu-Wei Chen
• Format: Others
• Language: zh-TW
• Published: 2003
• Online Access: http://ndltd.ncl.edu.tw/handle/19936957895138676334

碩士 === 淡江大學 === 航空太空工程學系 === 91 === This study is using shape from focus method for micro-component’s dimensional measurement. We established a computer controlled CMM system with optical device as an object’s detect sensor. The microscope of fixed focus is mount on the Z-axis stage that is driven by a stepper motor and the specimen is put on the XY table. Owing to fixed focus’s lens, the height of the object is the distance of lens’s position and it between the object’s surfaces from the basis plane when the image is focused. As the resulted data points from measurement on the 2-D plane and combined with focus operator, it can be used to estimate the object’s 3-D coordinate information. Three focus operators are utilized to compute local measures of the quality of image focus. When the microscope is to move from the near to the distant, or the distant to the near, the phenomenon of blurred to distinct and then blurred is shown on image, and that presents Gauss distribution by transfer to the quality of image focus. By utilizing above-mentioned method, it can predict the optimal position of focus from few images by using artificial-intelligence system. This well established CMM-optical system that is full field. The system can also overcome the insufficiency of contact CMM that due to probe size limitation in traditional quality inspection.