The sensors and actuators fabricated by the parylene MEMS technology

碩士 === 淡江大學 === 機械與機電工程學系 === 91 === This thesis describes the parylene MEMS technology as well as the low-temperature processes of surface micromachinings to fabricate the micro-chambers with parylene diaphragms. Such a low-temperature process below 120℃ can lower the entry-barrier to the surface m...

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Bibliographic Details
Main Authors: Yan-Tang Dai, 戴樘
Other Authors: Lung-Jieh Yang
Format: Others
Language:zh-TW
Published: 2003
Online Access:http://ndltd.ncl.edu.tw/handle/27011954259470419131