The sensors and actuators fabricated by the parylene MEMS technology
碩士 === 淡江大學 === 機械與機電工程學系 === 91 === This thesis describes the parylene MEMS technology as well as the low-temperature processes of surface micromachinings to fabricate the micro-chambers with parylene diaphragms. Such a low-temperature process below 120℃ can lower the entry-barrier to the surface m...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27011954259470419131 |