Diamond-like carbon films and amorphous carbon films deposited by RF plasma enhanced chemical vapor deposition
碩士 === 大同大學 === 材料工程研究所 === 91 === Amorphous carbon films and diamond-like carbon (DLC) films were prepared by RF plasma enhanced chemical vapor deposition (RF-PECVD). The carbon films deposited with different experimental parameters were characterized by Raman spectrometer, surface profiler, nanoin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67159980397791345330 |