Analysis and Design of a Semiconductor Electro-Thermal Microactuator
碩士 === 大同大學 === 機械工程研究所 === 91 === This thesis aim at semiconductor electro-thermal microactuator for analysis and design. The electro-thermal microactuator discussed in the article is composed of a semiconductor substrate, a flexible area which can deform as the difference of the temperature transf...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65554319786246195638 |