Development of fringe capacitive sensor with nano-scale precision
碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 91 === It had been proved by this lab that fringe capacitive can do distance measurement up to 10μm precision .In this paper, we used linear motor to further prove the fringe capacitive sensor can measure distance with precision up to 0.5μm. For the range between 0 ~...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77219516341821934051 |