Application of BPNN Controller to Run-to-Run Process Control
碩士 === 元智大學 === 工業工程與管理學系 === 91 === The purpose of this research is to develop a Back-propagation neural network-based (BPNN) run-to-run real-time process controller for the common process disturbances in semiconductor industries. We consider using BPNN for controlling the process disturbances, inc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68758972143703970622 |