Application of BPNN Controller to Run-to-Run Process Control
碩士 === 元智大學 === 工業工程與管理學系 === 91 === The purpose of this research is to develop a Back-propagation neural network-based (BPNN) run-to-run real-time process controller for the common process disturbances in semiconductor industries. We consider using BPNN for controlling the process disturbances, inc...
Main Authors: | Wan-Hsuan Chang, 張菀瑄 |
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Other Authors: | Chuen-Sheng Cheng |
Format: | Others |
Language: | zh-TW |
Published: |
2003
|
Online Access: | http://ndltd.ncl.edu.tw/handle/68758972143703970622 |
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