準分子雷射微細加工光電元件之研究
碩士 === 國防大學中正理工學院 === 兵器系統工程研究所 === 92 === The energy beam micro-fabricating techniques, such as X-ray LIGA, laser ablation , ion-beam etching, plasma etching and electrochemical discharge machining, have been more and more important with the blooming development of MEMS and nano-technology. Among t...
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| Format: | Others |
| Language: | zh-TW |
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2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47711243971790631154 |