Crystallization of silicon thin film by current passing through the refractory metal
碩士 === 長庚大學 === 光電工程研究所 === 92 === Using Poly-Si TFTs as the pixel elements and peripheral circuits has become the important techniques in developing AMLCDs (Active Matrix Liquid Crystal Displays). Crystallization of a-Si thin films has been considered the most important process for fabri...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07004894900290144209 |