NBTI-like Hot-Carrier Effect of SOI pMOSFET's with 1.3nm Gate Oxide

碩士 === 長庚大學 === 電子工程研究所 === 92 === SOI MOSFET effectively improves the performance of devices and the issues in conventional MOSFET. It’s will be the mainstream in IC industry. As the devices scaling down, a lot of problems will follow. The reliability of gate oxide is one of the importan...

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Bibliographic Details
Main Authors: Shih Cheng Hung, 洪詩証
Other Authors: Chao Sung Lai
Format: Others
Language:en_US
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/03688699843345364587