The design and simulation in a vertical MOCVD technique
碩士 === 中華技術學院 === 電子工程研究所碩士班 === 92 === MOCVD system has become the most popular technique used for LED manufactures in Taiwan. The MOCVD technique is very versatile. To date, a variety of materials have been grown using MOCVD. The purpose of this research is to develop a single-wafer spi...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/82470608542091736702 |