A Study of Integrated Dispatching Rule of Equipment and Material Handling System in Wafer Fabrication
博士 === 中原大學 === 工業工程研究所 === 92 === ABSTRACT The dispatching problems of tool and material handling in wafer fabrication are normally investigated independently due to the complexity of modeling. In this study, the integrated modeling approach involved automation of both manufacturing processes and m...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53vf95 |