| Summary: | 博士 === 中原大學 === 工業工程研究所 === 92 === ABSTRACT
The dispatching problems of tool and material handling in wafer fabrication are normally investigated independently due to the complexity of modeling. In this study, the integrated modeling approach involved automation of both manufacturing processes and material handling systems is conducted to evaluate dispatching strategies in a large-scale 300 mm wafer fabrication environment. In order to develop an integrated dispatching rule, a state-dependent dispatching methodology based on the theory of constraints is first developed to improve the overall system performance consisted of throughput, cycle time, work-in-process, and due-date performance. Then a material handling system is incorporated to construct a fully automated fab by using integrated modeling framework. Subsequently, the author presents an integrated tool and vehicle (ITV) dispatching strategy to consider multiple performance measures in a fully automated fab environment. The ITV dispatching strategy is developed using a state-dependent methodology and multiple response optimization. A case study based on a local fab is described to examine the performance impact of the ITV dispatching rule measured by cycle time, work-in-process, on-time delivery, and lot delivery time. The results of the simulation experiments and analysis show that the ITV dispatching rule is superior to the use of a static dispatching rule, consisting of an average of 15% improvement for on-time delivery and 5% for other performance measures.
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