Applying Virtual Product Development Technology on the Design of Wafer Retainer
碩士 === 朝陽科技大學 === 設計研究所 === 92 === The application of virtual product development (VPD) technology on the integrated design of wafer retainer is proposed in this study. The wafer retainer with the capacity of 25 12-inch wafer that normally weighs 7 to 8kg is transferred by using automatic transferr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ztj8k8 |