Investigation on the characteristics of ITO/Ti/GaN contact layers
碩士 === 大葉大學 === 電信工程學系碩士班 === 92 === In this experimental process, ITO films were deposited on glass substrates in RF sputtering system, and change growth parameter (including power and oxygen current capacity), research thin film Electrical and optical properties. Conventional photolitho...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/65828523637780003688 |