Apply the Image Recognition in the Precision Positioning Control of the Microstepping Stage

碩士 === 大葉大學 === 機械工程研究所碩士班 === 92 === With the mutuality of the precision machinery and Micro Electro Mechanical System technology, the positioning technology has played an important role on the development of precision measurement, semiconductor processing equipment and etc. In this thesis, a visio...

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Bibliographic Details
Main Authors: Yu Hsin Huang, 黃昱勳
Other Authors: Chih-Jer Lin
Format: Others
Language:zh-TW
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/11002533800058990111