Effect of additives on processing of PZT thick films
碩士 === 逢甲大學 === 機械工程學所 === 92 === In recent years, piezoelectric materials are used in many research fields. In the micro-electro-mechanical-systems, PZT piezoelectric thin films are combined with micro-machined elements as sensors. Fabricated by sol-gel and sputter methods, the thickness of thin fi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08735370469817639477 |