On the Fabrication and Performance Analysis of an Electro-thermal Microactuator
碩士 === 逢甲大學 === 機械工程學所 === 92 === ABSTRACT Devices of Micro-electro-mechanical System (MEMS) include microactuators, microsensors and their transducers. Where, the microactuators drives the whole system and enables the system to operate effectively. This thesis uses polysilicon as the structure...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59482337235612062478 |