Design, Fabrication and Analysis of Sound Pressure Microsensors
碩士 === 逢甲大學 === 機械工程學所 === 92 === The analysis, design, fabrication of capacitive microphone is presented in this thesis. Capacitive microphone with considerably higher sensitivity and low power consumption offers the innovative design for sound pressure microsensors. Polysilicon with smooth surfa...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/73893983220424937251 |