The study of AlN piezoelectric thin film processes
碩士 === 義守大學 === 材料科學與工程學系 === 92 === In this research, highly c-axis oriented AlN films were successfully deposited on silicon P type (100) substrate /titanium electrode by radio frequency (RF) magnetron sputtering system. For best quality of film, the effects of the working pressure, the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38060915593556339249 |