Nano-scale doping of SnO2 thin film gas sensor prepared by sputtering method
碩士 === 義守大學 === 材料科學與工程學系 === 92 === In this research, SnO2 thin film was prepared by using sputtering technique as gas sensor for monitoring concentration of gases such as: alcohol vapor, H2, CO, NO2 etc. Some parameters of the deposition process were studied including partial pressure,...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42183177930523954812 |