The Study of Microstructure and Biocompatibility of AlN Thin Film by Magnetron Sputtering
碩士 === 國立高雄應用科技大學 === 模具工程系碩士班 === 92 === In the study AlN films were prepared by reactive DC and RF magnetron systems. The various parameters such as power, nitrogen flow ratio, substrate and substrate temperature were performed to obtain AlN films with c-axis (002) preferred orientation. Forthermo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81667414228742363889 |