A Study of the Processing, Microstructure and Oxidation Behavior of Aluminum Nitride Coatings
博士 === 國立中興大學 === 材料工程學研究所 === 92 === Aluminum nitride (AlN) coatings were produced by a closed field unbalanced magnetron (CFUBM) sputtering system on a type (001) Si wafer. Processing parameters of the deposition system were manipulated to study the evolution of the microstructure and properties o...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12728618663812745455 |