Synthesis and Characterization of Chemical Amplified Negative Tone Photoresist
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 92 === Alicyclic monomeric 7-oxa-bicyclo[2,2,1]hept-5-ene-2exo,3exo- dicarboxlic acid anhydride (OBCA) was synthesized through Dield-Alder reaction. Chiral (-)-bornyl methacrylate ((-)-BMA) was prepared from dehydrating esterification of (-)-borneol and methacryl...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/n5t2e7 |