Design of Two-Dimensional Precision Embossing Platform with Magnetic Actuator
碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 92 === With the progress of MEMS technology, micro and nano fabrication technology of polymer have developed many applications in electro- optical science and biochemistry area. After combined with LIGA process, the nano imprint technology was developed to fabric...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93312756931073777599 |