Application of MEMS Thermal Film Sensor in Vortex Flowmeter on Pipe Flow Experiment
碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 92 === In this research, an array of membrane thermal film sensors array was manufactured by a MEMS fabrication process. The design was featured with using platinum as sensing material, and Aurum as the conducting wires to connect the platinum sensing material an...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/19526798701029870960 |