Application of MEMS Thermal Film Sensor in Vortex Flowmeter on Pipe Flow Experiment
碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 92 === In this research, an array of membrane thermal film sensors array was manufactured by a MEMS fabrication process. The design was featured with using platinum as sensing material, and Aurum as the conducting wires to connect the platinum sensing material an...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2004
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Online Access: | http://ndltd.ncl.edu.tw/handle/19526798701029870960 |