Design and Fabrication of Micro Thermal Chip With Sensors and Heaters
碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 92 === The micro-scale thermal fluid phenomena may be different from conventional theories. The MEMS is the most suitable devices for use in the experimental studies of the micro-scale flow and heat transfer. The objective of the present work adopts both the IC...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93284188604437793993 |