Study on the Fabrication of Resonant Underwater Acoustic Sensors by SOI wafer
碩士 === 國立成功大學 === 系統及船舶機電工程學系碩博士班 === 92 === Abstract The purpose of this study is to fabricate a strain-gage type acoustic sensor for underwater environment. We utilize the structure layer of SOI wafer as the sensing membrane to ease the fabrication process. By selecting various Si layer and o...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/81743639758756495363 |