Investigation of High-Performance Polysilicon- and Diffused-Resistors and Heterostructure Field-Effect Transistors (HFETs)
博士 === 國立成功大學 === 微電子工程研究所碩博士班 === 92 === In this dissertation, the characteristics of self-aligned silicide (salicide) and non-silicide polysilicon- and diffused-resistors are demonstrated and studied. In addition, a new heterostructure field-effect transistor (HFET), grown by a low-pressure meta...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31434314183913161868 |