Investigation and Fabrication of AlGaN/InGaN/GaN DHFET

碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 92 ===   In this thesis, we epitaxy AlGaN/GaN single heterostructure fieldeffect transistor (SHFET) and AlGaN/InGaN/GaN double heterostructure field effect transistor (DHFET). In AlGaN/InGaN/GaN DHFET, we epitaxy three structures with different InGaN thickness whic...

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Bibliographic Details
Main Authors: Keng-Yu Chen, 陳畊佑
Other Authors: Yan-Kuin Su
Format: Others
Language:en_US
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/btwqtu