The Study of Micro-Electro-Mechanical System (MEMS) Technology for Sensor and RF Inductor Applications

博士 === 國立成功大學 === 電機工程學系碩博士班 === 92 ===   In this dissertation, we report the study of Micro-electro-mechanical system (MEMS) technology for sensors, including, shear-stress sensor, far infrared sensor and RF inductor applications. The Finite Element Method (FEM) package ANSYS has been employed for...

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Bibliographic Details
Main Authors: Ming-Chun Hsieh, 謝明君
Other Authors: Yean-Kuen Fang
Format: Others
Language:en_US
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/67463795207585154449