A study on the fabrication and properties analysis of SiC/C micro-nano composite films
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 92 === The layer-by-layer carbon/silicon micro-nanocomposite films are deposited by ultra high vacuum ion beam sputtering system (UHV IBS) under different substrate temperature or at room temperature together with post vacuum annealing. The relations between depos...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92349229617432323372 |