A study of the laser spallation on thin film substrate
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 92 === The object of this thesis is to analyze the laser spallation on thin film substrate with the finite element method. The thesis was divided into two parts: the thin film spallation problem induced by plasma recoil pressure and thermal stress. Nd-YAG laser...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76173632066976447199 |