Simulation modeling and analysis for wafer fabrication facilities
碩士 === 國立成功大學 === 製造工程研究所碩博士班 === 92 === This paper presents a virtual fab simulation platform （Virtual Fab Simulation Platform, VFSP） that provides an efficient and flexible modeling tool to investigate various production issues during planning and implementation phases of 300mm wafer fabrication...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37902236102817766529 |