Design and Analysis of Six-DOF Sub-micron Positioning Stage
碩士 === 國立成功大學 === 製造工程研究所碩博士班 === 92 === A new type of six-DOF composite precision positioning stage is the object of study in this thesis. This precision stage has a horizontal motion (X and Y axes) stage which is made by horizontal motion (X and Y axes) mechanism and wedge-shaped mechanism that...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65779497551649803293 |