Fabrication of a Rib-Roughened Thermal Chip by MEMS Techniques and Measurement of Free Micro Jet Flow and Impingement Cooling Heat Transfer

碩士 === 國立成功大學 === 航空太空工程學系專班 === 92 ===   Experiments are performed to study the structure of a free micro-jet flow and micro-jet impingement cooling heat transfer over a thermal chip. In the current work, the thermal chip made was flat. The rib-roughened thermal chip was also made by etching the Si...

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Bibliographic Details
Main Authors: Chin-Jian Chang, 張欽荐
Other Authors: Chie Gau
Format: Others
Language:zh-TW
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/08427992077337065238